Novel Film Bulk Acoustic Resonator (FBAR) device
Bulk acoustic wave (BAW) sensors based on micromechanical systems (MEMS) offer significant advantages over quartz crystal microbalance (QCM); such as compact size, compatibility with electronics, lower power consumption, lower cost and higher reliability. However, their wide application to real-world detection remains limited by the temperature-dependence of their performance. Recently researchers at the University of Cambridge have developed a novel Film Bulk Acoustic Resonator (FBAR) device which has the potential to overcome this limitation by enabling the simultaneous measurement of temperature and mass loading in a single device without increasing their size or adding complexity to the electronics. Through the use of a novel multi-layer device structure and electrode materials, temperature self-referenced FBAR resonators with high operating frequencies (~1-2 GHz) and world-leading Q-factors (>1500) have been produced paving the way for real-world monitoring using FBAR sensors.
Key potential benefits:
Parallel sensing of several physical variables within the same unit sensor
Small size (around 150μm × 150μm)
Ultrahigh sensitivity ( in range of 10-14 to 10-15g)
Tuneable frequency of actuation (suitable for >1 GHz applications)